INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 21)

MDC-260 DEPOSITION CONTROLLER
GENERAL DESCRIPTION 1-3
1.3 SPECIFICATIONS
1.3.1 MEASUREMENT
Frequency Resolution 0.03 Hz @ 6.0 MHz
Mass Resolution 0.375 ng/cm
2
Thickness Accuracy 0.5% + 1 count
Measurement Update Rate Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate 10 Hz
Sensor Crystal Frequency 2.5, 3, 5, 6, 9, 10 MHz
1.3.2 DISPLAY
Thickness Display Autoranging: 0.000 to 999.9 KÅ
Rate Display Autoranging: 0.0 to 999 Å/sec
Power Display 0.0 to 99.9%
Time Display 0 to 9:59:59 H:MM:SS
Crystal Health 0-99 %
Layer Number 1 to 250
Graphics Display 240X64 Color LCD with CCFL
backlighting
Color Schemes 4 built-in color presets
1.3.3 COMMUNICATION
Protocol USB 1.1
Driver Microsoft Windows driver included
1.3.4 PROGRAM STORAGE CAPACITY
Process 10 (user definable)
Layer 250 (user definable)
Material 8 (user definable)
1.3.5 PROCESS PARAMETERS
Process Name 12 character string
View/Run Password 4 character string
Edit Password 4 character string
Layer# 1 to 250 Thickness, material name