INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 61

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MDC-260 DEPOSITION CONTROLLER

PROGRAMMING AND CONTROLLER SETUP

4-25

This parameter determines the value displayed in the Sensor Status screen. The
available options are sensor Thickness or Frequency. Note that, while in the
Source-Sensor Status Screen, Figure 5-8, pressing the “7” key will toggle the
sensor display between Thickness and Frequency.

5. Time Display (Estimated State, Layer or Elapsed Process, Layer or State time)

This parameter sets the displayed value in the Time display on the front panel.
The choices are estimated state or layer time, or the elapsed process, layer or state
time.

6. Rate Graph (Enabled, Disabled)

This parameter defines whether the rate verses time graph is enabled as one of the
status screens.

7. Power Graph (Enabled, Disabled)

This parameter defines whether the power verses time graph is enabled as one of
the status screens.

8. Thickness Graph (Enabled, Disabled)

This parameter defines whether the thickness verses time graph is enabled as one
of the status screens.

9. Rate Dev. Graph (Enabled, Disabled)

This parameter defines whether the rate deviation verses time graph is enabled as
one of the status screens.

10. Run Screen (Enabled, Disabled)

This parameter defines whether the Run-Screen is enabled as one of the status
screens.

11. Source/Sensor Status (Enabled, Disabled)

This parameter defines whether the source/sensor status screen is enabled as one
of the status screens.

12. I/O Status (Enabled, Disabled)

This parameter defines whether the I/O status screen is enabled as one of the
status screens.

13. Parameter Screen (Enabled, Disabled)

This parameter defines whether the Parameter screen is enabled as one of the
status screens.

14. Color Scheme (Scheme#1 – #4)

This parameter allows the user to toggle between four pre-defined color schemes.

Note: If all status screens are disabled, the Run-Screen will be displayed when
the Status key is pressed. If all graph screens are disabled, Rate Vs. Time Graph
will be displayed when the Graph key is pressed.

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