INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 22)

MDC-260 DEPOSITION CONTROLLER
GENERAL DESCRIPTION 1-4
1.3.6 MATERIAL PARAMETERS
Material Name 10 character string
Sensor # 1 to 2
Crystal # 1 to 16
Source # 1 to 2
Pocket # 1 to 16
Density 0.80 to 99.9 gm/cm
3
Acoustic Impedance 0.50 to 59.9 gm/cm
2
sec
Tooling Factor 10.0 to 499.9%
Proportional Gain 0.00 to 9999
Integral Time Constant 0 to 99.9 sec
Derivative Time Constant 0 to 99.9 sec
Rise to Soak Time 0 to 9:59:59 H:MM:SS
Soak Power 0 to 99%
Soak Time 0 to 9:59:59
Rise to Predeposit Time 0 to 9:59:59
Predeposit Power 0 to 99.9%
Predeposit Time 0 to 9:59:59
Rate Establish Time 0 to 60 sec
Rate Establish Error * 0 to 99.9%
Deposition Rate (#1, #2*, #3*) 00.0 to 999.9 Å/sec
Ramp (#1, #2*) Start Thickness 0 to 100% [100% = Ramp Disabled]
Ramp (#1*, #2*) Stop Thickness 0 to 100%
Time Setpoint 0 to 9:59:59
Ramp to Feed Time 0 to 9:59:59
Feed Power 0 to 99.9%
Feed Time 0 to 9:59:59
Ramp to Idle Time 0 to 9:59:59
Idle Power 0 to 99.9%
Maximum Power 0 to 99.9%
Power Alarm Delay 0 to 99 sec
Minimum Power 0 to 99.9%
Rate Deviation Attention 0 to 99.9%
Rate Deviation Alarm 0 to 99.9%
Rate Deviation Abort 0 to 99.9%
Sample Dwell % 0 to 100%
Sample Period * 0:01:00 to 9:59:59
Crystal Fail Switch, Time Power, Halt, Abort
Backup Sensor # 1 to 2
Backup Crystal # 1 to 16
Backup Tooling Factor 10.0 to 499.9%
Material Password 4 character string
* These options are made available based on the settings of surrounding
parameters, and will not appear if their value is not needed.