INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 179)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-41
29 Controller State 1 Binary (0...25) N/A
30 Abort Process Errors 1 Bit 6: Max Rate/Min Pwr
Bit 7: Min Rate/Max Pwr N/A
31 Alarm 1 Errors 1 Bit 0: Action Setup Corrupted
Bit 1: Output Setup Corrupted
Bit 2: Input Setup Corrupted
Bit 3: Crystal Fail, Process Halted
Bit 4: Rate Establish Error
Bit 5: Active Layer Corrupted
Bit 6: Active Process Corrupted
Bit 7: System Setup Corrupted N/A
32 Alarm 2 Errors 1 Bit 1: No Sensor Enabled for Material
Bit 2 = Halt Process Action
Bit 3 = Sound Alarm Action
Bit 4 = Rate Deviation Alarm
Bit 5 = Crystal Fail/Time Power Mode
Bit 6 = Sensor Fault
Bit 7 = Source Fault N/A
33 Alert Errors 1 Bit 3 = Sound Alert Action
Bit 4 = Minimum Power Alert
Bit 5 = Maximum Power Alert
Bit 6 = Rate Deviation Alert
Bit 7 = Crystal Marginal & Deposit N/A
34 Attention 1 Errors 1 Bit 0 = Process Complete
Bit 1 = Minimum Power Attention
Bit 2 = Maximum Power Attention
Bit 3 = Rate Deviation Attention
Bit 4 = Xtal Marginal&!In Process
Bit 5 = Xtal Fail&!In Process
Bit 6 = Xtal Marginal&In Proc., Switch
Bit 7 = Xtal Fail&In Proc., Switch N/A