INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 32)

MDC-260 DEPOSITION CONTROLLER
BENCH CHECKOUT & INSPECTION 3-2
3.4.1 MATERIAL #1 PARAMETERS
Material Name Cr
Sensor # 1
Crystal # 1
Source # 1
Pocket # 1
Density 07.20 gm/cm
3
Acoustic Impedance 28.95 gm/cm
2
sec
Tooling Factor 100%
Proportional gain 2400
Integral Time constant 99.9 seconds
Derivative Time constant 0.00 seconds
Rise to Soak Time 0:00:10
Soak Power 5 %
Soak Time 0:00:10
Rise to Predeposit Time 0:00:10
Predeposit Power 9.5 %
Predeposit Time 0:00:05
Rate Establish Time 0 seconds
Deposition Rate #1 10.0 Å/second
Ramp #1 Start Thickness 100 % (No Rate Ramps)
Time Setpoint 0:00:00
Ramp to Feed Time 0:00:05
Feed Power 7 %
Feed Time 0:00:10
Ramp to Idle Time 0
Idle Power 0
Maximum Power 20 %
Power Alarm Delay 5 seconds
Minimum Power 0 %
Rate Deviation Attention 0 %
Rate Deviation Alarm 0 %
Rate Deviation Abort 0 %
Sample Dwell % 100 % (Continuous Sampling)
Crystal Fail TimePwr
Backup Sensor # 1
Backup Crystal # 1
Backup Tooling Factor 100 %
Material Password 0000