Utility setup, Source setup, Utility setup -4 – INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 40: Source setup -4

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MDC-260 DEPOSITION CONTROLLER

PROGRAMMING AND CONTROLLER SETUP

4-4

4.2.1 UTILITY

SETUP

The only critical parameter in the Utility Setup is the Crystal Frequency
parameter. This parameter must be set for the specific frequency crystals that you
plan to use (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz).

The Simulate Mode parameter may also be useful in the initial setup and testing
phase of the MDC-260. Simulate Mode provides a means of simulating
deposition on the crystal. This mode is useful for testing the setup of the MDC-
260 without having to deposit any material.

If you only are using one MDC-260, leave the USB Interface Address at 01.
Numbers greater than 01 are used when multiple MDC-260’s are connected to the
same system.

4.2.2 SOURCE

SETUP

When defining sources or sensors, the MDC-260 will automatically create the
inputs and outputs necessary to complete the interface based on the parameter
settings. Therefore, once the setup is complete, the user should review the inputs
and outputs noting the pin assignments so that the proper connections can be
made. Also note that the I/O pin assignments can be changed if necessary in the
program input and output screens.

The following two items in the Source Setup are common to almost all types of
sources and typically require definition:

Source Shutter - If the source has a shutter to be activated by the MDC-260

then the Shutter Relay Type parameter must be set to either N.O.
(normally open) or N.C. (normally closed). The typical setting is N.O.
which means that the relay will close to open the shutter.

Once defined, the MDC-260 will create a relay output called “SourceN
Shutter” that should be connected to the shutter actuator. The shutter can
be tested by pressing the Shutter key with the controller in the Process
Ready state. When the red LED in the Shutter key is illuminated then all
source shutters should be opened. When the shutter LED is off then all
source shutters should be closed.

If the shutter actuator has a significant delay in opening and closing then
set the Shutter Delay parameter equal to the delay.

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