INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 74)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-38
This parameter defines the number of pockets, or crucibles, available for the
source. The default value is 1 for a single pocket source.
2. Shutter Relay type (N.O., N.C., None)
This parameter defines the shutter relay type used to control the source shutter.
The following three relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
None - No sensor shutter output is created.
3. Shutter Delay (sec) (0.0 to 9.9 seconds)
This parameter should be set to the time it takes for the source shutter to
open/close. At the start of the deposition, the controller will delay adjusting the
power for this amount of time to allow the shutter to completely open. At the end
of deposition, the controller will begin closing the source shutter this much time
before the target endpoint thickness is reached so the final thickness should be
very close to the target.
4. Control (Manual, Direct, BCD, Indv)
This parameter defines the type of pocket control utilized.
Manual, as it implies, means not under control of the MDC-260. Under manual
control, the MDC-260 will stop the process upon the completion of the current
layer when the next layer requires a different pocket. A message prompting the
operator with the material required is displayed in the LCD window. Once the
pocket has been changed, the process is resumed by pressing the Start key.
BCD and Indv are used when control is through an external pocket rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the pocket. The controller creates the number of outputs
required to interface with the external controller and sets the outputs as required
to signal a pocket change.
Direct is used when the actuating device is driven directly. In this case the
controller sets up one or two outputs, one for each available direction, to drive a
motor or solenoid.
5. Drive (Up, Down, Fast, Inline, Sngl Step, Dbl Step)
When the Control type is Direct, this parameter defines the drive method or
direction. For Sngl Step and Dbl Step drive types, the controller sets up one
output which is either singly or doubly pulsed to actuate a solenoid to sequentially
step the rotator to the desired position. For Up and Down drive types, the
controller sets up one output to control a drive motor which is turned on until the
rotator reaches the desired position. For Fast and Inline drive types, the controller
sets up a drive up and a drive down output. For the Fast drive type, the controller
determines the fastest direction to the target pocket position and turns on the