INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 18)

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FIGURE 13-1 PLUG PIN OUT - SOURCE CABLE CONNECTOR.........................................13-1
FIGURE 16-1 MAP OF STATUS AND GRAPH SCREENS.....................................................16-1
FIGURE 16-2 MAP OF PROGRAMMING MENU SCREENS.................................................16-2
List of Tables
TABLE 4-1 TABLE OF INPUT STATES FOR BCD FEEDBACK TYPE...............................4-37
TABLE 4-2 TABLE OF INPUT STATES FOR BCD FEEDBACK TYPE................................4-39
TABLE 5-1 TROUBLE CONDITIONS AND WARNINGS...................................................... 5-8
TABLE 6-1 DEFAULT AND RANGE FOR PID PARAMETERS............................................. 6-3
TABLE 6-2 SUGGESTED PID STARTING VALUES FOR DIFFERENT SOURCES............. 6-3
TABLE 8-1 SOURCE CONTROL SYSTEM INTERFACE CONNECTOR PIN
ASSIGNMENTS ................................................................................................................. 8-8
TABLE 8-2 DISCRETE I/O SYSTEM INTERFACE CONNECTOR PIN ASSIGNMENTS ... 8-9
TABLE 8-3 FRONT PANEL MANUAL POWER CONNECTOR PIN ASSIGNMENTS.......8-10
TABLE 10-1 MATERIAL DENSITY AND ACOUSTIC IMPEDANCE VALUE....................10-9