Document Outline

• Cover Page
• Title Page
• Trademarks
• Disclaimer
• Disclosure
• Copyright
• General Safety Warning
• Declaration Of Conformity
• Warranty
• SAFETY PRECAUTION AND PREPARATION FOR USE
• SAFETY TERMS AND SYMBOLS
• Table Of Contents
• GENERAL DESCRIPTION
  • PURPOSE
  • FEATURES
    • AMPLE PROGRAM STORAGE
    • DYNAMIC MEASUREMENT UPDATE RATE
    • SUPERIOR COLOR GRAPHICS DISPLAY
    • PROGRAM SECURITY
    • DESIGNED FOR UNATTENDED OPERATION
    • FAIL SAFE ABORTS
    • ABORT STATUS RETENTION
    • RUN COMPLETION ON CRYSTAL FAILURE
    • POWERFUL SYSTEM INTERFACE
    • POWER SUPPLY NOISE TOLERANCE
    • INTERNATIONAL STANDARD POWER CONNECTOR
  • SPECIFICATIONS
    • MEASUREMENT
    • DISPLAY
    • COMMUNICATION
    • PROGRAM STORAGE CAPACITY
    • PROCESS PARAMETERS
    • MATERIAL PARAMETERS
    • INPUT/OUTPUT CAPABILITY
    • SENSOR PARAMETERS
    • SOURCE PARAMETERS
    • UTILITY SETUP PARAMETER
    • OTHERS
  • ACCESSORIES
• FRONT PANEL DISPLAYS AND CONTROLS
  • GRAPHIC LCD DISPLAY
    • PROGRAMMING SCREENS (MENUS)
    • RUN-TIME GRAPHS
    • STATUS SCREENS
      • MAIN RUN SCREEN
      • SOURCE/SENSOR STATUS SCREEN
      • INPUT/OUTPUT STATUS SCREEN
      • ACTIVE LAYER PARAMETER UPDATE SCREEN
      • POSITION CONTROL SCREEN
  • OPERATING CONTROLS
    • STATUS KEY
    • GRAPH KEY
    • PROGRAM KEY
    • MANUAL KEY
    • START KEY
    • ABORT KEY
    • RESET KEY
    • ZERO KEY
    • SHUTTER KEY
    • ARROW KEYS
    • ALPHANUMERIC KEYPAD
• BENCH CHECKOUT & INSPECTION
  • INSPECTION
  • COLD POWER UP
  • WARM POWER UP
  • SAMPLE PROGRAM
    • MATERIAL #1 PARAMETERS
    • MATERIAL #2 PARAMETERS
    • PROCESS PARAMETERS
  • SIMULATE OPERATION
  • MANUAL OPERATION
• PROGRAMMING AND CONTROLLER SETUP
  • GENERAL
    • NAVIGATING THE MENU STRUCTURE
    • ENTERING ALPHA CHARACTERS
    • ENTERING TIME PARAMETERS
    • COPYING AND DELETING
    • PASSWORD PROTECTION
      • VIEW/RUN PROCESS PASSWORD
      • EDIT PROCESS PASSWORD
      • EDIT MATERIAL PASSWORD
    • ADJUSTING LCD DISPLAY CONTRAST
    • SPECIAL FUNCTION KEY
  • GETTING STARTED
    • UTILITY SETUP
    • SOURCE SETUP
    • SENSOR SETUP
      • EXAMPLE USING MAXTEK’S RSH-600 SIX CRYSTAL SENSOR HEAD
    • INPUT, OUTPUT AND ACTION SETUP
    • DISPLAY SETUP
    • MATERIAL SETUP
      • POWER RAMPS
      • AUTOMATIC CRYSTAL SWITCHING
      • RATE ESTABLISH
      • RATE RAMPS
      • RATE SAMPLE MODE
      • RATE DEVIATION ACTIONS
    • PROCESS SETUP
    • STARTING A NEW PROCESS
    • RESUMING A PROCESS FROM ABORT OR HALT
  • DETAILED PROGRAMMING
    • VIEW/EDIT PROCESS
      • DEFINE A PROCESS
    • VIEW/EDIT MATERIAL
      • DEFINE A MATERIAL
    • SYSTEM SETUP
      • EDIT DISPLAY SETUP
      • PROGRAM INPUTS
      • PROGRAM OUTPUTS
        • ENTERING A CONDITION STRING
        • CONDITION TYPES
      • PROGRAM ACTIONS
      • EDIT SENSOR SETUP
      • EDIT SOURCE SETUP
      • EDIT UTILITY SETUP
• OPERATING THE MDC-260
  • SIGN-ON SCREEN
  • STARTING A NEW PROCESS
  • STARTING A NEW LAYER
  • RESUMING AN ABORTED OR HALTED PROCESS
  • GRAPH DISPLAYS
  • STATUS DISPLAYS
    • MAIN RUN SCREEN
    • SOURCE-SENSOR STATUS SCREEN
    • I/O STATUS SCREEN
    • ACTIVE LAYER PARAMETER UPDATE SCREEN
    • POSITION CONTROL SCREEN
  • MODES
    • PROCESS READY
    • ABORT
    • HALT (SOFT ABORT)
    • IN PROCESS
    • NOT SAMPLING
    • PROCESS COMPLETE
    • MANUAL
    • SIMULATE
  • STATES
  • TROUBLE, ERROR AND WARNING MESSAGES
    • DESCRIPTION
      • MIN RATE&MAX POWER
      • MAX RATE&MIN POWER
      • SYSTEM SETUP MEMORY CORRUPTED
      • PROCESS MEMORY CORRUPTED
      • MATERIAL MEMORY CORRUPTED
      • RATE EST. ERROR
      • CRYSTAL FAILURE
      • SOURCE FAULT
      • SENSOR FAULT
      • NO SENSORS ENABLED
      • TIME POWER
      • RATE DEV. ALARM
      • ALARM ACTION
      • CRYSTAL MARGINAL
      • RATE DEV. ALERT
      • MAX POWER ALERT
      • MIN POWER ALERT
      • ALERT ACTION
      • XTAL FAIL SWITCH
      • XTAL MRGN SWITCH
      • RATE DEV. ATTEN
      • MAXIMUM POWER
      • MINIMUM POWER
      • CHANGE POCKET...
      • CHANGE CRYSTAL...
      • ATTENTION ACTION
      • PRESS START TO RESUME PROCESS
• TUNING THE MDC-260 CONTROL LOOP
  • CONTROL LOOP BASICS
  • CONTROL LOOPS APPLIED TO VACUUM DEPOSITION
  • ESTABLISHING MDC-260 CONTROL LOOP PARAMETERS
• INPUT/OUTPUT CHARACTERISTICS
  • SOURCE CONTROL VOLTAGE OUTPUT
  • SENSOR INPUT
  • DISCRETE OUTPUTS
  • DISCRETE INPUTS
• CONTROLLER INSTALLATION
  • MOUNTING
  • PROPER GROUNDING
  • EXTERNAL CONNECTIONS
    • POWER ENTRY MODULE
    • POWER CORD
    • LINE VOLTAGE SELECTION AND FUSE REPLACEMENT
    • GROUND LUG
    • REMOTE POWER HANDSET
    • SENSOR INTERFACE
    • SOURCE INTERFACE
    • USB COMMUNICATION
    • DISCRETE INPUT/OUTPUT
      • CONFIGURING INPUT TYPE
  • POWER SWITCH
  • CONTROLLER COVER REMOVAL
• SYSTEM INSTALLATION
  • SENSOR HEAD DESCRIPTION
  • SENSOR HEAD INSTALLATION
  • SENSOR OSCILLATORS
    • SO-100 OSCILLATOR
    • VPLO-6 OSCILLATOR
    • INSTALLATION
  • INSTRUMENTATION FEEDTHROUGH
  • SENSOR CRYSTAL REPLACEMENT
    • CRYSTAL CARE AND HANDLING
    • CRYSTAL REPLACEMENT PROCEDURE
  • TYPICAL SYSTEM INSTALLATION
• THEORY OF OPERATION
  • BASIC MEASUREMENT
  • FILM THICKNESS CALCULATION
  • SENSOR CRYSTAL
    • CRYSTAL HEALTH
    • CRYSTAL STABILITY
    • TEMPERATURE COEFFICIENT OF THE CRYSTAL
    • CRYSTAL LIFE EXPECTANCY
    • CRYSTAL ELECTRODE TYPE RECOMMENDATION
  • RATE CALCULATION
  • EMPIRICAL CALIBRATION
    • FILM DENSITY
    • TOOLING FACTOR
    • ACOUSTIC IMPEDANCE
• COMPUTER INTERFACE
  • GENERAL
  • HOST API FUNCTIONS
    • SI_GetNumDevices
    • SI_GetProductString
    • SI_Open
    • SI_Close
    • SI_Read
    • SI_Write
    • SI_SetTimeouts
    • SI_GetTimeouts
    • SI_SetBaudRate
  • PROTOCOL
  • DATA TYPES
  • TRANSMISSION RECEIPT
  • TRANSMITTING AND RECEIVEING MESSAGES
  • INSTRUCTION SUMMARY
  • INSTRUCTION DESCRIPTIONS
    • Code #00: Remote Keypress Activation of Controller
    • Code #01: Send System Information
    • Code #02: Send Utility Parameters
    • Code #03: Receive Utility Parameters
    • Code #04: Not Supported
    • Code #05: Not Supported
    • Code #06: Send a Material
    • Code #07: Receive a Material
    • Code #09: Send Number of Undefined Layers
    • Code #10: Send Process
    • Code #11: Receive Process
    • Code #12: Delete Process
    • Code #13: Send Process Layer
    • Code #14: Insert Process Layer
    • Code #15: Replace Process Layer
    • Code #16: Delete Process Layer
    • Code #17: Send Process List
    • Code #18: Send Source Setup
    • Code #19: Receive Source Setup
    • Code #20: Send Sensor Setup
    • Code #21: Receive Sensor Setup
    • Code #22: Send Input Setup
    • Code #23: Receive Input Setup
    • Code #24: Send Output Setup
    • Code #25: Receive Output Setup
    • Code #26: Send Action Setup
    • Code #27: Receive Action Setup
    • Code #28: Send Controller Status
    • Code #29: Start Process
    • Code #30: Send Run-Time Values
    • Code #31: Initiate Automatic Data Logging
    • Code #32: Internal Command
    • Code #33: Set Active Source Power
    • Code #34: Internal Command
    • Code #35: Internal Command
    • Code #36: Not Supported
    • Code #37: Not Supported
    • Code #38: Remote Activation of Controller
    • Code #39: Send a Run-Time Value
    • Code #40: Enable/Disable the Front Panel Keyboard
• REPAIR AND MAINTENANCE
  • HANDLING PRECAUTIONS
  • MAINTENANCE PHILOSOPHY
  • TROUBLE SHOOTING AIDS
  • RETURNING THE MDC-260 TO THE FACTORY
• APPENDIX A – MATING CABLE COLOR CODES
• APPENDIX B – PARAMETER TEMPLATES
  • MATERIAL
  • PROCESS
  • DISPLAY SETUP
  • INPUTS
  • OUTPUTS
  • ACTIONS
  • SENSOR SETUP
  • SOURCE SETUP
  • UTILITY SETUP
• INDEX
• MENU MAPS