INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 100)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 98 of 276 ^
Figure- 3.14 Manual Power Control
STOP
INC DEC
When you leave the Manual Power Mode (by pressing the fixed MANUAL key again), the STC-
2002 will enter the DEPOSIT phase of the film in use. The control loop will be active at this point. If the
Thickness number is greater than the programmed Final Thickness value when you leave MANUAL, the
STC-2002 will go to the next process step.
[The push buttons on the pendent hand controller can be used for other functions when the STC-2002 is not
in the Manual Power Mode. By using the programmable I/O, these keys can control internal I/O events or output to
relays. One common use example is to assign one of these buttons as an I/O program input to manually trip the final
thickness limit. An example of using these buttons for these functions is given in Example 5 of Section 5 of this
manual.]
Manual Power Control (LCD keys)
If the pendent is missing or if the pendent's key functions have been re-programmed (reassigned
functionality) by an I/O program, there are available arrow keys that accomplish the identical functions.
These have already been discussed in section 3.0. To reiterate briefly, switching between DEPOSIT and
MANUAL can be accomplished on the Runtime screen, 1
st STATUS screen and 2 nd STATUS screen. On
the 1 st STATUS screen, two arrow keys appear when switching into MANUAL mode. Press the UP arrow
key to increase power % value. Press the DOWN arrow key to decrease power % value.
deposit manual
press fixed MANUAL key for manual power adjustment using pendant