INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 41
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 2.XX
e page 39 of 276 ^
The Power Related RunTime Screen parameter Dependency List is:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx Film Parameters
(Manual mode)
Running Process + Pressing fixed front panel MANUAL key +
attached Pendent (or on 1
st
STATUS screen: , , zero CH x)
(process
start)
.
Perform
Carry out the following 2 key sequence up to 3 times.
Press the fixed front panel START key + 1 of 4 touch panel keys:
Break Wait, Next Layer, Restart Layer, Reset / Start Process
(see figure in end of section 2.7). Use the appropriate touch key for the
task
at
hand.
If
unsure,
use
Reset / Start Process key in all 3 sequences.
Please read and understand this manual before starting a live process.
.
options
material selection (4-2 to 4-6).
substrate
selection
(4-2)
tooling factor (ch 4, 4-3)
<< fig. 10-9, equip list 10-10 >>
<< sensor inst. 11-3 >
>