INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 148

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 4.XX

e page 146 of 276 ^


The RELAY OUTPUTS connector provides the user an interface to 8 Form C (SPDT) relays. The

contact rating of these relays is 2A at 30 VDC or 2A at 30 VAC maximum. Do not exceed these ratings or
damage will occur.

As with the Optocoupler Inputs, each relay function is definable and programmable. The eight

output relays of the STC-2002 can be programmed to respond to logical combination of the following:
external events (the eight remote inputs); the state of the deposition process; active layers; or
setpoints of the STC-2002. Programmable internal memory elements within the STC-2002 can
provide many system control functions, such as cycle counters or sequencers, which previously
required external hardware. The first four relay outputs are pre-programmed at the factory per the
following table. Any input may be reprogrammed or deprogrammed as needed.

Factory Installed
Relay Output Program

Rela
y
No.

Function Comm

on Pin
No.

NO
Contact
Pin No.

NC Contact Pin No.

1 Crystal

Fail

13 12

25

2 Source

Shutter

Relay

24 23 11

3

Xtal 2 Select

10

9

22

4 Thickness

Setpoint

21 20

8

5 User

Defined

7

6

19

6 User

Defined

18 17

5

7 User

Defined

4

3

16

8 User

Defined

15 14

2

pin 1 is not connected

Relay Outputs for Factory Installed I/O Program

The standard STC-2002 is equipped with eight SPDT relays. These are Form C (SPDT) relays and have
normally open and normally closed contacts. The normally open contacts become active when their
respective function is true. It is assumed that the OUTPUT card PCB is in slot 2 (see figure 3.1 for I/O slot
designations).

Factory Output Relays
The definitions of the factory programmed relay outputs are as follows:

Output 1

Crystal Fail - This Relay provides a contact closure whenever the selected sensor crystal
fails to operate properly or has exceeded its operating range. A flashing XTAL BAD
message will be displayed on the LCD to alert the user of this condition.

Output 2

Substrate Shutter Relay - This Relay is intended to provide control of the substrate
shutter. It is generally activated during the deposition phase.

Output 3

Xtal 2 Select - Relay is closed when sensor 2 is the active sensor.

Output 4

Thickness Setpoint - This Relay provides a contact closure whenever the accumulated
thickness display value equals or exceeds the thickness setpoint parameter value of the
active film. A zero event (front panel or remote) or thickness setpoint parameter change
resets this.

Relay
Ratings

Relays-
Connections and
Functions

SECTION 4.9

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