INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 220)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 218 of 276 ^
Parameter 40 rate from sensor 3
access index: RATE3
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 3 with 9999 representing 999.9 Å/S. 3 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 41
rate from sensor 4
access index: RATE4
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 4 with 9999 representing 999.9 Å/S. 4 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 42
rate from sensor 5
access index: RATE5
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 5 with 9999 representing 999.9 Å/S. 5 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 43
rate from sensor 6
access index: RATE6
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 6 with 9999 representing 999.9 Å/S. 6 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 44
rate from sensor 7
access index: RATE7
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 7 with 9999 representing 999.9 Å/S. 7 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 45
rate from sensor 8
access index: RATE8
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 8 with 9999 representing 999.9 Å/S. 8 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
______________________________________________________________________
Parameter 46
xtal life/status from sensor 1
access index: XLIFE1
Value Range 0 To 99
Units Percent
xtal life/status from sensor 1. This parameter along with the following seven parameters form a contiguous
block of 8. Associated card needs to be physically installed and enabled before a reboot.
______________________________________________________________________