INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 234)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 232 of 276 ^
Parameter 21
Source Voltage Set To Zero
Value Range 0,1
Units False, True
If true, this parameter forces the source control voltage to zero volts. A false value remover this override
condition.
______________________________________________________________________
Parameter 22
At Rate
Value Range 0, 1
Units False, True
Deposition is at Desired Rate. If this parameter is TRUE the measured rate is equal to the desired rate, else
(0) not at desired rate.
______________________________________________________________________
Parameter 23
Allow Zeroing
Value Range 0, 1
Units False, True
Zeroing allowed when entering deposit. If this parameter is true (1) then Zeroing is inhibited on entering a
deposit, else it is allowed [default].
______________________________________________________________________
Parameter 24
Crystal Test Mode
Value Range 0, 1
Units 0 normal (need both working), 1 limp along on 1 crystal.
Normally, a unit configured for dual sensor operation requires both channels to be valid at the start of a
deposition. In a multi-film deposition, it is possible to have a crystal failure on one of the channels after
successfully finishing several initial layers. By disabling the need for both channels to be valid in later
layers, the process can continue automatically with only one remaining crystal.
______________________________________________________________________
Command Examples
Command G1=1
Response A
Description
Set status parameter 1 (soak hold status) to 1 or true. This will cause the process sequence
to hold at the end of soak 2 and wait for the soak hold status to become false. Command understood and
accepted.
Table 6.14: More Group 5 Examples.
Group 6-- Read, Trigger Events
Commands H & I
(H,I) Event Commands. These commands read and force certain conditions to occur in the STC-2002.
When setting an event, only the parameter number is needed. There is no data associated with the
parameter. (See Table 6.15)
Event Commands (H,I)
These commands are used to poll and trigger certain events in the STC-2002. When polling, a
value of 0 or 1 is returned indicating not occurred or occurred. The poll status is latching, that is if an event
Read, Trigger Events