INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 44

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 2.XX

e page 42 of 276 ^

I/O programs are not factory restored because of the danger involved. Factory restore will not, therefore,
clear or restore the factory I/O program[s] (it leaves them unchanged). Purge will, however, clear I/O
programs
. These selections will cause the unit to REBOOT with the new configuration in effect. The
section describing the SERVICE menu will describe these elements in detail. As seen in the above lists,
there are groups of settings (Film parameters, System configuration, Communications, Processes, I/O
programs, etc.) that will be included in these configurations. Valuable process programming could be
lost.
The BYE key can be pressed to leave the SERVICE menu without changing anything.

If the password is forgotten and programming has not been saved in some other

media, call the factory to eliminate passwords without purging memory.


.

deposition programming (text discussions, the next section has details)

input/output programming (text discussions, the next section has details, ch 5)

.


I/O programming Introduction


The I/O programming is what controls the opto-isolated inputs on the Input card and the isolated relay
contacts on the Output card. Similarly controlled, the front panel has 4 LEDs that are intended as user
controlled outputs, 4 user programmable fixed keys that are intended as user controlled inputs and the
pendent whose alternate function is user I/O programmable inputs. This I/O programming control extends
to input acquisition of front panel key presses, elements of film deposition run cycle states (i.e. rise, soak,
deposit, idle, etc.), various process state conditions, process switching, various crystal states or events,
setpoint conditions, etc. I/O programming also controls by means of general variables, events and states.

~

The I/O programming can discern whether an input has changed state and when it has changed state. When
an input has both state information and temporal information, it is known as an edge event condition. When
an input has only the state information, it is known as a steady state condition. Outputs also have analogous
edge event and

/

steady state conditionality. The output result is, correspondingly, either a pulse or a steady

state.

To reiterate, Run time mode is the general name for the mode used to run the deposition process

whose screen can always be brought forth from any menu screen by pressing the fixed front panel key
labeled STATUS. The Run time mode of the STC-2002 has 2 basic process control modes: sequencing
mode
and non-sequencing mode. While in either one of these modes, manual mode (manual control of
power) may be invoked. The specific functional run time mode must be chosen by menu selection:
sequencing or non-sequencing.

In addition, a test mode can be employed to simulate a crystal sensor input (w/ simulated rate

information) while in any combination of the modes just described. Simply put, the sequencing / non-
sequencing mode difference is that of having or not having a process. Non-sequencing mode does not have
a process (or at least nothing named as such). Non-sequencing mode uses 1 implicit process which can run
1 film.

The non-sequencing mode is easiest to configure (user programs an active film). The sequencing

mode is more complicated only by the additional programming of a process[es] that calls out a film or
films.


Inputs, outputs and all the other states and events have a numeric representation called an ID number. An
ID number is used to numerically represent: inputs, outputs and all the other states and events. They can be
named by their description and classified by state/event condition. A table containing all I/O programming
events and states can be found in this manual. After locating an event or state that the user needs as a
pivotal point in their process, the identifying ID is found. Next, consideration of the needed I/O
programming function type is assessed. The available function types are: Input, Output, Trip, Arm, Drop,
Set and Clear. The combination of function type and ID number produces (in STC-2002 terminology) a
token. For the sake of LCD screen limitation imposed brevity, only the first letter of the function type is
used to describe the function. Token constituent elements can also include other elements such as a single
Boolean operator.

Incorrect function type / ID pairings are identified for the user and not allowed as an

entry.
Although film parameters provide time, power and thickness based control, I/O programming provides not
only these but added dimensions to the kind of control that is achievable. The number of conditional
elements is increased dramatically.

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