INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 134

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 3.XX

e page 132 of 276 ^



To view / program film parameters...

Screen

Key{s] to press

Run Time

fixed MENU

MAIN MENU

REVIEW FILM

REVIEW FILMS menu

GO2 F

I

LM (to select different film, if needed)

REVIEW FILMS menu

arrow[s] + EDT (edit)

( Lock Code, if enabled [see Sys Config]

numeric entry + ENT (enter) )

Review Films Edit menu

arrow[s] + CHG (change)

Review Films Edit/Change Numeric Entry

numeric entry + ENT (enter)

See Section 1.8 for Programmable Parameter List.



To set the NEXT

ACTIVE

PROCESS (sequencing mode only)...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

NEXT

ACTIVE

PROCESS

NUMERIC ENTRY MENU

Digit (1-9) + ENT

ER




To view / program PROCESS steps (sequencing mode only)...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

REVIEW PROCESSES

Review Processes menu

GO2 PR

O

C

ESS

(to select a different process, if

needed [process selected on numeric entry
screen by digit + ENT

ER

])

Review Processes menu

arrow[s] ; EDT (edit)

( Lock Code, if enabled [see Sys Config]

numeric entry + ENT (enter) )

Review Processes Edit menu

arrow[s] ; INS (insert) ; DEL (delete) ; CHG
(change) step line

Review Processes Edit/Change menu

arrow[s] ; MOD (mode) ; FLM (film) ; THK
(thickness)

Review Processes Edit/Change Mode menu

SKP (skip) ; STP (stop) ; AUT (auto) ; END ;
WAI (wait) ; ENT (enter)

Review Processes Edit/Change Film menu

numeric entry + ENT (enter)

Review Processes Edit/Change Thickness
menu

numeric entry + ENT (enter)




To view Process Accounting History (sequencing mode only)...

Screen

Key[s] to press

Run Time

fixed MENU

MAIN MENU

EXECUTIVE MENU

EXECUTIVE MENU

PROCESS ACCNT

Process Accounting History menu

arrow[s]

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