INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 26

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 2.XX

e page 24 of 276 ^

In terms of STC-2002 usage, the simplest configurations would be either in sequencing mode with: 1
crystal, 1 oscillator, 1 process, 1 film, 1 material, and 1 deposit or in non-sequencing mode with: 1 crystal,
1 oscillator, 1 film, 1 material, and 1 deposit. Also for the

se

simplest configurations, in either sequencing

or non-sequencing mode, a single sensor input would be employed along with a single control voltage
output (controls power to that which is generating the evaporant). The simplest means of evaporant stream
generation would be resistive heating.

In terms of unit hardware, this translates into an STC-2002 with 1 sensor card, 1 output card and 1

input card.

In terms of unit software (menu programming), a specific film is either called by a process (in

sequencing mode) or called directly (in non-sequencing mode). The film, in turn, calls out a specific sensor
map. Except for co-deposition applications, which will be explained elsewhere, only 1 process, only 1 film,
only 1 map can be active (running) at a single point in time. A process can call a different film at each of
its steps (or layers) up to 99 steps.

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