INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 223

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 6.XX

e page 221 of 276 ^

Read RunTime Data Command Examples
Command

E3 or E 3

Response A-1
Description

Read Deposition Thickness In Angstroms. Thickness is Minus 1 Angstrom.

Command E4
Response A93
Description

Read Phase Timer. Timer is 93 Seconds, Or 1 Minute, 33 Seconds.

Table 6.11: Group 4 Examples.
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Read, Set Status Information

Group 5--

Commands F & G

(F)

Read Status Information. These commands will read certain status data from the STC-2002. This

includes information such as whether the unit is stopped, what film is active, is the unit at max. power, etc.
This information is in a more condensed form then available through the I/O system. The command is the
letter F followed by a parameter number.
(G)

Set Status Information. This forces certain status to occur in the STC-2002. The group command

is the letter G followed by {1|2|3|17|21|22|23|24} = {0|1|2|3}. Note: 2,3 only allowed on G3 = form. There
are only 8 parameter options in this group.

Command: F
Mnemonic: EXCT_rstat

(read

status)

Parameters: [1..66] corresponding to system status types SKHLD..LAUNCHFNO
Description: Requests a read back of status information regarding the current operating

status of the instrument.

Returns:

[RZCD_AOK][status_value] if proper type # (1..66) id was sent. Exact value of
[status_value] depends on the particular parameter for which the data was requested.

[RZCD_ILDV] if improper value for parameter arguments.

[RZCD_ILSN] if too many arguments, wrong delimiters, etc.

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Command: G
Mnemonic: EXCT_wstat

(write

status)

Parameters:

[1,2,3,17,21,22,23,40,66] [assign_delim] [status_value] with 1,2,3,...40,60
corresponding to system status types SKHLD..MCTL, FLMHLD, JAMZPR,
ATRATE, ZERO, IO_SCALAR_ANALOG and LAUNCHFNO. The status_value is
the new intended status value for the status parameter to take on.

Description: Command allowing certain internal status conditions (SKHLD, FORSPL, MCTL,

FLMHLD, JAMZPR, ATRATE, ZERO, XTST, IO_SCALAR_ANALOG and
LAUNCHFNO) to be set to specific status values via the communications interface. See the F
command for status read for valid range of [status_value] argument for a given value of the
status variable selection index (SKHLD, FORSPL, MCTL, FLMHLD, JAMZPR, ATRATE,
ZERO, IO_SCALAR_ANALOG, LAUNCHFNO ).

Returns:

Read, Set Status Information

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