INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 60)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 58 of 276 ^
SECTION 3.2 RunTime Screen
SEE SECTION x2.21 for proper initialization sequence.
When the instrument powers up and has fully initialized, you are presented with the RunTime
Screen. When this display is present, you can start, stop, and view the operation of the STC-2002. Figures
3.1 and 3.5, show typical RunTime Screens. While the RunTime screen is displayed, the 2
nd and 3 rd press
of the STATUS key will bring forth 2 screens showing detailed sensor channel information and live keys.
Note → The fixed STOP Key is active on any screen.
There are several areas of interest on the RunTime screen.
RunTime Display Description
Area
# 1: Rate, Power and Thickness
1. Rate, Power, and Thickness Values. These are the current values of the three most important
process data and their units. These values are displayed on the LED displays in large
format. They are also shown on the first line of the main menu screen. If you choose to
review any data items on other screens, this information will always be present on the
LED displays. When max power is reached: the text PWR% will alternate with [MAX!]
(on MAIN menu) and the LED display section showing power will blink.
Area # 2: Current Phase
2. Current Phase. This tells you what phase or stage of your process that you are currently in.
After you power up the STC-2002 or you return from a power loss, it is in a STOPPED
RESET state. Other main states are MANUAL, plus all of the phases associated with
source conditioning and DEPOSITION.
Area # 3: Data Area
3. Data Area. This shows a real-time view of your deposition process (an X/Y graph). Both the
vertical and horizontal scale of this display area can be changed to make this display the
most meaningful for your process. The data shown in this area during the DEPOSIT
phase can be one of three types; rate deviation, rate, or power. The data type and scale are
programmable as film parameters. This area is overwritten by the START menu options
when the fixed start key is pressed (shown below).
Figure- 3.5: RunTime Screen
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