INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 209)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 207 of 276 ^
(C) Read system parameters. These commands read the system oriented commands, that is those not
associated with any film. The group command is the letter C followed by a system parameter
number.
(D) Write System Parameters. These commands are used to set the system parameters. The group
command is the letter D followed by the system parameter number, the character "=", and the data
value.
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Command: C
Mnemonic:
EXCT_rdsp (read system parameters)
Parameters: [2..32] corresponding to system parameter types AFILM..REQMEMMOD .
Description: Requests a read back from the selected system parameter value. See the list of
parameters and the corresponding ident code below.
Returns:
[RZCD_AOK][param_value] if proper parameter id was sent. Exact format of
[param_value] depends on the particular parameter for which the data was
requested.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
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Command: D
Mnemonic:
EXCT_wrsp (write system parameters)
Parameters: [2 .. 32] [assign_delim] [desired_value] corresponding to parameter types
AFILM..REQMEMMOD as in C command above. The desired_value is a numeric
data item of proper range and representation (# of decimals points, etc..) used to
update or change the value of the parameter to. This value is expressed in the same
manner as returned to the host when a C type command is issued (See A and B
commands above).
Description: Command to set or store a new parameter value into one of the system parameter
variables.
Returns:
[RZCD_AOK] (A or B) if correctly processed.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if chosen parameter can not be programmed at this time. This
applies to run number, active film or process, system configuration, etc..
Commands C and D, System Parameters
Parameter 1 Rate sample able, dual sensor able, shutter delay able
access value: OBSO Was CNFG, no longer used.
Value Range 0 - 1
Units On / Off
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Parameter 2
Active Process Number
access value: AFILM active film / or active process, depending on sequencing
Value Range 1 To 9
Units None
Read or set the process number that is currently active. The set command is inhibited if a process is
running.
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