INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 42)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 2.XX e page 40 of 276 ^
Initial Programming Setups (menu parameters)
system configuration programming (factory/ default settings, stand alone / computer controlled)
If the STC-2002 has: arrived directly from the factory or the factory settings key has been menu selected or
the purged settings key has been menu selected, the following specifies the parameter values in effect.
The following information will be repeated in later sections in greater detail along with additional related
information. The intent here is to introduce the reader to baseline values and consequently what must be
altered for the intended use. Purge values are listed first, followed by the factory differences.
Film Parameter values after purge: Communication values after purge:
[non-SEQ adds "Final Thick Limit=0.0 KÅ"]
Material Density 1.00 gm/cc COM/IO Lock Code 0
Material Z-Factor 1.000 Keyboard Beep ON
Setpoint thick limit 0.000 KÅ RS232 Baud Rate 9600
Setpoint time limit 0:00 MM:SS RS232 Protocol Sycon
Soak 1 Power Value 0.0%
Power Ramp 1 Time 0:00 MM:SS System Configuration values after purge:
Power Soak 1 Time 0:00 MM:SS
Soak 2 Power Value 0.0% LCD Contrast MEDIUM
Power Ramp 2 Time 0:00 MM:SS Password Lock # 0
Power Soak 2 Time 0:00 MM:SS Run Number 0
Soak 3 Power Value 0.0% Recorder Functions Off
Power Ramp 3 Time 0:00 MM:SS Recorder Output Channel 1 (note conflict: Source Sensor Out is also1)
Deposit Rate 0.0 A/S Clock Time no change (HH/MM/SS)
Rate Ramp Mode OFF (w/o battery: 00/01/00)
New Deposit Rate 0.0 A/S Clock Date no change (MM/DD/YY)
Rate Ramp Time 0:00 MM:SS (w/o battery: 01/01/01)
Rate Ramp Trigger 0.000 KÅ Need SS Card 1 ON
Control Loop P 100 Need SS Card 2-4 Off
Control Loop I 1.0 secs I/O Slot x Type Disabled (where x = 1 to 4)
Control Loop D 1.0 secs Memory Module IFC OFF/ON (optional)
Max Power Limit 0.0% Run Time Screen after PURGE:
Abort Max Power SW ON
Max Power Dwell 0:30 MM:SS PROC ess 1 note1
Shutter Delay Mode Off Layer # note1
Shutter Delay Timeout 0:30 MM:SS FILM (film in use) 1
Shutter Delay Quality 10 SRC (Source Control Volts Channel) 1
Rate Sampling Off XTAL (blank)
Sample Interval 0:30 MM:SS MAP# 1
Sample Dwell Time 0:30 MM:SS RUN time 0:00
Sample Quality 10 PHASE time 0:00
Sample Alarm Time 0:30 MM:SS RUN# 0
Film Fail Mode Time Power (Graph parameter) Rate Deviation
Control Loop Quality L 0 Crystal Quality L/Q (Sample/Hold = blank)
XTAL Stability S 0
XTAL Life Bounds 0.0% MAIN MENU Screen after PURGE:
Plot Vert Scale Volts 100
Plot Horiz Scale H 1 Review Film (film 1 will be reviewed)
Data Plot Type RATE DEV Review SS Map (Map 1 will be reviewed)
SS Map Select 1 Next Process 1
Pocket Select 0 Review Processes (Process 1 will be reviewed)
Etching Mode Off (pos/neg)
note1: non-sequencing mode does not have this function (non-SEQ: ACTIVE FILM is 1).