P stc-2002, Deposition controller y – INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 55

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 3.XX

e page 53 of 276 ^

evaluate/reinstate a failed crystal sensor, by force fail key or otherwise, the RE-VERIFY key is used. The
RE-VERIFY key checks all potentially active crystals and re-verifies their status as good or bad. This is
useful when a nearly loaded crystal is replaced as in the following example scenario.

Starting with 3 crystal sensors mounted in a chamber, each having external electrical connections and

oscillators in place, one crystal sensor is connected to sensor channel 1, and one crystal sensor is connected to sensor
channel 2. If channel 2 is programmed as its backup, automatic switching to the second crystal sensor on the second
channel is accomplished when the crystal sensor on channel 1 is force failed. Replacing the broken/loaded crystal on
the first channel (with the 3

rd

unconnected crystal sensor) and re-verifying allows the first channel to be used again.

This example, meant as glimpse into some possibilities, presents only the effected topics here but there are other
elements such as shutters, thickness values, etc. to be considered.

An example of a force fail selection appearing to the right.

An example of a zero thick selection appearing to the right.

An example of the 1

st

STATUS screen during a deposition when not in manual mode. Note the absence of

arrow keys.

An example of the 2

nd

STATUS screen during a deposition when not in manual mode. The MOR

e

key

reveals channels 5 through 8.

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