INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 143

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 4.XX

e page 141 of 276 ^

[for optimum noise immunity, it is recommended that a shielded, twisted pair cable be used to make the connection
from the STC-2002 to the power supply control input or strip chart recoder of the deposition system]

Control Signal 1

Pin No.

+Output 9

-Output 4

Analog Ground (common)

5

Shield SHLD

Connector Type – 9 PIN D-SUBMINIATURE female

Control Signal 2

Pin No.

+Output 2

-Output 6

Analog Ground (common)

1

Shield SHLD

Connector Type -- 9 PIN D-SUBMINIATURE (ON THE SAME CONNECTOR DESCRIBED ABOVE)

Analog Recorder Output Connection/Usage


As previously discussed, the analog outputs are identical and interchangeable. One output per

STC-2002 may be used for a strip chart recorder regardless of the number of sensor cards enabled. A
standard unit having one sensor card may use the second channel for strip chart recording as discussed
here. In this example, the second output provides an analog output voltage proportional to either displayed
rate, rate deviation, power, or thickness. The channel and status value are selected using the system
configuration menu. The names of the related system configuration menu items are recorder function,
recorder output channel and need SS card.

The second analog output, here described for possible use as the analog recorder output voltage,

has the connections as described above for Control Signal 2, that is pins 2, 6, 1 and shield. It is
recommended that a shielded, twisted pair cable be used to make the connection from the STC-2002 to the
chart recorder input.

Analog Recorder Output Specifications (any analog output)

Resolution

12

Bits

Accuracy

0.3 % Fs

Loading Capacity

5 mA

Full Scale Output

10 Volts

Analog Recorder Output Calibration / Interpretation


Recorder Output Types

Thickness Mode - The analog recorder output in the thickness mode is always scaled for plus or

minus 999 angstroms full-scale (9.99V). Resolution is always one (1) angstrom. Display readings above
999 angstroms will be sent to the recorder output as the remainder of the displayed value divided by 1000.

SECTION 4.7

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