INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 51)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 49 of 276 ^
SECTION 3.0 Menu Programming and Operation Details
Overview
To reiterate, the STC-2002 is an extremely flexible and versatile deposition process controller.
Through its soft key menus on the LCD display screen it can be configured to do almost any deposition
process and conform to almost all system requirements. (Soft key refers to the LCD overlay touch keys
whose definition, at any point, is software dependent.)
It would be advantageous, while reading this manual, to take an STC-2002 without connections,
add the AC power cord and switch the STC-2002 to the power on position. With the unit unconnected
from the system and powered-on, try (as far as possible) what is being read from this manual using the
STC-2002 hardware. The RunTime screen will always appear at power up after a correct initialization.
Pressing the fixed front panel MENU key while the RunTime screen is displayed, provides access
to these menus. The programming menus, which concern the deposition process, are the FILM parameters
and the PROCESS listing. Film parameter menus along with an associated source sensor map contain
material and source dependent parameters. Parameters for 99 material/source combinations can be stored
in the STC-2002. In the STC-2002 these 99 films can be arranged to form a process of up to 99 layers, with
each layer having an independent final thickness. Nine different processes can be stored. Only one film
within one process can be actively controlling at a given time (non-active sources can be maintained at non-
zero levels). The STATUS key returns the RunTime screen from any menu screen. In addition, the
STATUS key provides detailed source information in two screens when pressed with the RunTime screen
displayed.
The unit utilizes the extremely sensitive and time proven 6 MHz quartz crystal as the sensor
device. The STC-2002 can operate from 90VAC to 264VAC (50-60Hz, 1.4A rms@120VAC, 0.7A rms@230VAC ).
Units are shipped from the factory with a 120V nominal line voltage cordset. Before attempting to operate
the unit with other than this cordset (voltages beyond the 120V nominal range), proper IEC-320 cordset
must be selected as appropriate for the line voltage and mating receptacle configuration. See section 4.XX.
Deposition Programming
The STC-2002 is a Deposition Rate Controller with LCD/LED displays. It uses keys along with
menus for programming. Programming choices are defined or valid ranges are given. Invalid entries are
ignored. There are three general categories of menu operations performed on the STC-2002 that can be
classified as programming of the instrument. There are a few interdependencies that cross group lines.
1) Deposition Programming
2) Input/Output Programming 3) System Configuration Programming
The I/O and System Configuration programming generally occur only at the initial installation or
when the coating system is physically altered. The first part of Section's Group 3.XX of the manual
describes the Deposition Programming and general operation of the STC-2002. The later part of this
section's group covers system configuration. If the STC-2002 arrives installed in a system, Section 3.XX
may be the only section of the manual that is required to be read. Section 4.XX covers the physical
installation of the sensor and unit . Section 5.XX of this manual describes the operation and use of the
programmable I/O which allows the STC-2002 to be easily interfaced to most systems.
All of these programming functions are performed through the front panel keys of the STC-2002
or alternately through one of the computer interfaces described in Section Group 6.XX Software controlled
touch key areas on the LCD display are shown below.
If anything is unclear, return to section group 2.XX.
LCD display
has a
12 X 4 key
touch panel
overlay.