INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 3)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 0.XX e page 1 of 276 ^
TFC-2002
USERS MANUAL 518-029
Rev <preliminary> June 7, 2003
. current :
Sycon STC-2002 Deposition Controller
>
MANUAL
CONTROL
RATE-A/SEC POWER-% THICKNESS-KA
START
STOP
MANUAL ZERO
STC-2002
DEPOSITION CONTROLLER
MENU
STATUS
instruments
>
WARNING !
The power cord protective
grounding conductor must be
connected to ground. No user
serviceable parts inside. Refer
servicing to qualified personnel.
FUSE: 2 x 2.00 AMP
QUICK-ACTING (F) 250v
90-264 vac, 50-60 Hz, 230VA MAX
INPUTS / OUTPUTS
SOURCE
SENSORS
I/O 4 1/O 3 I/O 2 I/O 1
COMM OPTION
RS232
MEM
instruments
7 5 3 1
8 6 4 2
7 5 3 1
8 6 4 2
.
overview w/ generalizations only
intro to user interface, overview from general to specific
=
overview w/ generalizations and intro to specifics as generalizations are developed
.
< Sycon reserves the right to change any information contained in this manual without notice
© Copyright Sycon Instruments, Inc. & Telemark 2003
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