INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 114)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 112 of 276 ^
SECTION 3.18 Process Accounting
The process accounting screen displays a summary of the vital parameters of the last four previous
deposition films. It is useful to review this screen at the completion of a deposition run and compare the
results to the previous similar runs. Trends which show changes in source conditions, deposition material
supply or pending crystal failure can sometimes be determined by the comparison of the vital parameters
shown on the process accounting screen.
All the data displayed on this screen can also be 'read' through the computer interface for longer-
term storage (more than four runs) or hard copy data logging. Starting at the Runtime screen...
Press the fixed front panel Menu key to invoke
On the Executive menu, press the Process
the main menu. Acc ou nt ing key.
The following is the initial screen when process accounting is selected (page 1 of 5). The first line of the
list is RUN# and it remains stationary as the list is scrolled in order to maintain a fixed frame of reference.
The double arrow down moves the list a section at a time so that the list is displayed in 5 line sections in 5
pages (a 5 line window moving down the list). The double up arrow moves the viewed section of the list in
the same way but the direction is up the list. The scrolling function will wrap. After the 5
th page, the view
will revert to the 1 st page when the double down arrow key is pressed. After the 1 st page, the view will
revert to the 5 th page when the double up arrow key is pressed.
The following screens show the progression through the list using the double down arrows.
Page 2 of 5
Page 3 of 5
Page 4 of 5
Page 5 of 5
Figure- 3.16: Process Accounting Screens
Please note screens 4 of 5 and 5 of 5. The XTAL % life is reported for the start condition in the first 3
characters (e.g. A17, F00, O00, O..) and for the ending condition in the next 3 characters (e.g. A17, F00,
O00, O..). The first of the 3 characters is a letter code that is explained in the table below and the next 2
characters are a numeric value, which is the XTAL % life. The O letter code has an additional