INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 232)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 6.XX e page 230 of 276 ^
access: XTLDEADMAP Bitmap, sensors detected as dead.
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Parameter 49
access: XTLSBYMAP Bitmap, sensors in standby.
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Parameter 50
access: XTLUSMAP Bitmap, sensors in use contributing.
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Parameter 51
access: SA1_HEADSTATE Source Board-A chl1 head status of HSTAT_class
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Parameter 52
access: SA2_HEADSTATE Source Board-A chl2 head status of HSTAT_class
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Parameter 53
access: SB3_HEADSTATE Source Board-B chl3 head status of HSTAT_class
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Parameter 54
access: SB4_HEADSTATE Source Board-B chl4 head status of HSTAT_class
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Parameter 55
access: SC5_HEADSTATE Source Board-C chl5 head status of HSTAT_class
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Parameter 56
access: SC6_HEADSTATE Source Board-C chl6 head status of HSTAT_class
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Parameter 57
access: SD7_HEADSTATE Source Board-D chl7 head status of HSTAT_class
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Parameter 58
access: SD8_HEADSTATE Source Board-D chl8 head status of HSTAT_class
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Parameter 59
access: ACPROC Active process.
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Parameter 60
access: ACTSRCMAP Active source bitmap.
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Parameter 61
access: S4A_BRDSTS Board slot A S4 status
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Parameter 62
access: S4B_BRDSTS Board slot B S4 status
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Parameter 63
access: S4C_BRDSTS Board slot C S4 status
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Parameter 64
access: S4D_BRDSTS Board slot D S4 status
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Parameter 65
access: BOX_FATAL_MD Instrument is in fatal unrecoverable mode.
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Parameter 66