Programmable parameter lists – INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 16
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 1.XX
e page 14 of 276 ^
SECTION 1.8
Programmable Parameter Lists
.
programmable parameter list (1.4)
.
__________________________________________________________________
key examples:
Full Parameter Name
⇒ Abbreviated
Menu
Name
Param
eter
N
ame
⇒
Param N
(text)
⇒ implied parameter text in parenthesis
__________________________________________________________________
Film Parameter List:
Review Film
(Edit Film)
[Menu end point: Review Film
Menu path: Main/Review Film]
(Material)
Density
0.40 to 99.99 gm/cc
(Material)
Z-Factor
0.100 to 9.999
Setpoint Th
ic
k
ness
Lim
it
0.000 to 999.999 KÅ
Final Thickness Limit (Trigger)
0.000 to 999.999 KÅ (non-sequencing only)
Setpoint Time Lim
it
0:00 to 99:59 MM:SS
Soak 1 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 1 Time
(to pwr level)
0 to 99:59 MM:SS
P
o
w
e
r Soak 1 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 2 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 2 Time
(to pwr level)
0 to 99:59 MM:SS
P
o
w
e
r Soak 2 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 3 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 3 Time
(to pwr level)
0 to 99:59 MM:SS
Deposit Rate
(requested)
0.0 to 999.9 A/S
Rate Ramp Mode
OFF / ON
New Dep
osit
Rate
(Value)
0.0 to 999.9 A/S
Rate Ramp Time
(Duration)
0:00 to 99:59 MM:SS
Rate Ramp
(Thickn)
Tr
i
g
ge
r
Point
0 to 999.999 KÅ
Control Loop –P
roportional term
- 1 to 9999
Control Loop –I
ntegral term
-
0.0 to 99.9 sec
Control Loop –D
erivative term
-
0.0 to 99.9 sec
Max Power Limit
0.0 to 100.0%
Abort Max P
o
w
e
r SW
itch
OFF/ON
Max Power Dwell
0:01-99:59 MM:SS
Sh
u
t
te
r Delay Mode
OFF, ON
Sh
u
t
te
r D
e
l
a
y TIMEOUT
0:01-99:59 MM:SS
Sh
u
t
te
r D
e
l
a
y QUALITY
1-50%
(XTAL)
RATE SAMPLING
OFF,TIMED,INTELL.
(XTAL)
SAMPLE INTERVAL
0:01-99:59 MM:SS
(XTAL)
SAMPLE DWELL TIME 0:01-99:59 MM:SS
(XTAL)
SAMPLE QUAL
1-50%
(XTAL)
SAMPLE ALARM TIME 0:01-99:59 MM:SS
FILM Fail Mode
ABORT
IF FAIL
, TIME P
O
W
E
R
C
on
t
ro
l Loop Qual L
imits
0 to 9
XT
A
L Stability S
(Limits)
0 to 9
XTAL Life Bounds
0.0-100.0%
Plot Vert Sc
a
l
e
V
olts
1, 5, 10, 50, 100
Plot Hor
i
z Sc
a
l
e
H
1 to 600 samples
Data Plot Type
Rate /Rate Deviation /Power