INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 52)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 50 of 276 ^
STC-2002 Front Panel
There are several areas of interest on the Front Panel. These are illustrated in Fig. 3.1.
MANUAL
CONTROL
RATE-A/SEC POWER-% THICKNESS-KA
START
STOP
MANUAL ZERO
STC-2002
DEPOSITION CONTROLLER
MENU
STATUS
instruments
Figure- 3.1: STC-2002 Front Panel
and Key Descriptions
Fixed Keys and Software Controlled Keys (Touch Screen)
The
software controlled touch keys and the fixed MENU key are used for programming entries,
numeric and otherwise, and to navigate through the programming menus of the STC-2002. When the STC-
2002 is initially turned on or generally when it is in operation, the display on the screen will be similar to
the display shown in Figure 3.1. This is called the RunTime screen. It shows most of the vital parameters
of the deposition process and is described
more fully in Section x2.3. When the fixed MENU key is
pressed the unit enters its programming menu tree. The touch keys select the menus and/or program the
parameters. When the RunTime screen is displayed, some touch keys are active such as the area
containing the text "L/Q". Pressing this area on the RunTime screen brings forth sequential text for the
various control loop quality factors (crystal stability modes) (see Section. x2.10). This allows selection of
the alternate modes
(1-4) . Forcing a sample, if crystal sample and hold is implemented, can also be selected
by pressing the text "SMPL" (see Section. x2.10).
Typical Runtime screen.
The fixed STATUS key returns the Run Time Screen from any menu screen, when the Run Time screen is
displayed, the STATUS key brings forth 2 consecutive screens: the first showing source control output/
pocket/ power and the next sensor channel contribution and status before returning to the RunTime screen.
To reiterate, the fixed front panel STATUS key is a multifunction key. The different navigational
functions are based on the screen (or category of screen) that is displayed when the STATUS key is
Fixed Keys: STOP, START, MANUAL, ZERO, MENU, STATUS
pendant jack
(manual mode) LCD Display/Touch
Screen
Fixed USER programmable software
controlled keys (4) and yellow LED
indicators (4). Software control
is accomplished by user entered
I/O programming.
LED displays
(3 sections)