INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 131)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 129 of 276 ^
PWR number is moving around 15%. You will notice the graph on the screen start to plot also. This can
give you valuable information on the quality of your control loop and overall process.
Process Wait
Since the start Mode programmed for layer 2 is AUTO, when layer 1 reaches its end thickness
layer 2 begins using parameters from Film 3. When the STC-2002 sequences to layer 5 a PROC[ESS]
WAITING message is displayed, this occurs because a WAIT was programmed for the start MODE for
layer 5. To continue the test process through layer 5 & 6, press START: Break Wait.
There are several things that you can do from the RunTime Screen. If you press the fixed ZERO
key, the THICK number will be zeroed. By pressing the fixed STOP key during any phase, the STC-2002
will abort the run and the power will go to 0%. By doing this you can become familiar with how START:
Restart Film & Next Layer can be used to recover a process.
This completes the programming example for the 6 layer , 2 film process. If you have followed
along, you have learned how to review and program a process (Process 1), how to select, review and edit
films (Film 1 & 3) and how to start and stop a process. If you are installing the STC-2002 in a system or
programming an actual process, several more parameters would have to be programmed for each film.
These film parameters are detailed in Section 2.12.
Section 2.13 details optional film parameters which appear when some user selected system
options are invoked. This section should be reviewed to see if they pertain to your particular system
configuration requirements.
The example process above was 6 layers using two films. This implies that two sources or two
pockets of a rotatable source would be used in the actual deposition system.
The STC-2002 also allows you to implement either of these configurations by using its versatile
programmable I/O feature. An I/O program for controlling a multipocket source is shown in example 3 in
the I/O Programming Section (Section 5). The I/O program for the dual source configuration is given as
example 4 in Section 5. All the Front Panel controls such as START can also be implemented to be
controlled remotely through the programmable I/O or alternately through one of the other computer
interfaces
.
Process START: RESET / START PROCESS diagram
Some ERROR conditions may need 3 RESET/START’s to return to a running process. See "Process
START: RESET/START PROCESS diagram"
↑
VERIFY
XTAL
WAIT
CHECK
BUSY
Proc
ERROR
REST
STOP
1 st RESET/START PROC
2 nd RESET/START PROC
3 rd RESET/START PROC
LAYER = #