P stc-2002, Deposition controller y – INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 53

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 3.XX

e page 51 of 276 ^

pressed. The following illustrates the 4 possibilities. Three are part of a sequence that begins with the
RunTime screen and returns to the RunTime screen.






















The following 2 LCD screen depictions show the second and third parts of the above 3 part sequence.
The following 2 screens will be called the 1

st

STATUS screen and the 2

nd

STATUS screen respectively.


1

st

press of STATUS key from Runtime screen brings forth this screen.


2

nd

press of STATUS key from Runtime screen brings forth this screen.



The following shows a RunTime screen that was put into manual mode by pressing the fixed front panel
MANUAL key while running a deposition cycle. The text MANUAL appears on the screen in place of the
text messages: rise 1, soak 1, rise 2, soak 2, deposit, etc.

1

st

STATUS

screen

2

nd

STATUS

screen

RunTime
Screen

STATUS
key pressed

1

st

(detailed)

STATUS Screen

1

st

(detailed)

STATUS Screen

STATUS
key pressed

2

nd

(detailed)

STATUS Screen

2

nd

(detailed)

STATUS Screen

STATUS
key pressed

RunTime
Screen

Any Menu
Programming
Screen

STATUS
key pressed

RunTime
Screen

3 Pa

rt Circ

ular

Sequence

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