INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 80)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 78 of 276 ^
Parameter POCKET SELECT
Select Value; Range is 0 – 63
Units Pockets
Pocket Select
This parameter is used to provide pocket information from a specific film in conjunction with the
ss map parameter: indexer sync mode. If indexer sync mode is set for either delay or feedback, then
following an XTAL verify, the indexer activity will commence before arriving at the RISE1 phase. Either a
1 of N or a binary (3 digit) value issued through output relays by I/O programming will select the correct
pocket. If indexer sync mode is set to none, then the POCKET SELECT parameter has no effect.
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Parameter
ETCHING MODE
Polarity Value: OFF/ON
Units None
Etching Mode
This parameter sets the STC-2002 for either a deposit mode (positive rate) when set to OFF or an
etch mode (negative rate) when set to ON.
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