INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 79)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 77 of 276 ^
Parameter XTL STABILITY
Select Value; Range 0 - 9
Units None
Crystal Stability Limit
This parameter is used to set a threshold on acceptable sensing crystal performance. When the
threshold is exceeded a sensor fail condition is assumed and the system will process this condition as
configured. A programmed value of 0 disables this test. A value of one gives the tightest limits.
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Parameter
XTAL LIFE BOUNDS
Percentage Value; Range is 0.0 - 100.0
Units Percent
Crystal Life Limit
This parameter is used to provide a setpoint on the allowable sensing crystal usage. This setpoint
may be utilized through the I/O system as a warning or interlock that sensing crystals need attention.
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The following three parameters are used to select the data type and scale factors for the RunTime
screen graphics area. These parameter values are always reinstated when a film is started.
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Parameter
PLOT VERT SCALE
Vertical Scale;
Select Specific Values 1/5/10/50/100
Units Å/s or % Power as selected
Vertical Scale RunTime Display
This parameter sets the vertical scale factor of the graphics display on the RunTime Screen. If
Rate deviation is the type of data being displayed, generally setting this value to 10 will give a good display
of the deposition control.
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Parameter
PLOT HORIZ SCALE
Horizontal Samples; Range is 1-600
Units Samples Per Display Point
Horizontal Scale RunTime Display
This parameter sets the horizontal sweep rate of the graphics display on the RunTime screen.
Samples are taken at a rate of 4 per second. A programmed value of 1 will display every sample. The
X-axis is 200 samples wide on the RunTime display. By increasing the sample number the sweep rate is
slowed down. Proper selection of this number allows an entire deposition cycle to be displayed on one
sweep of the screen, if desired.
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Parameter
DATA PLOT TYPE
Initial Plot, Select 1 of 3 choices:
Rate
Rate Deviation
Power
Units Å/S or % Power as selected
Data Plot Type
This parameter selects the type of information to be displayed in the graphics area of the RunTime
screen.
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Parameter
S ource S ensor MAP SELECT
Select Value; Range is 1 – 30
Units maps
Source Sensor Map Select
This parameter is used to associate a specific sensor map to a specific film. When a film becomes
active, it will invoke the map number named by this parameter. The map itself is edited/changed within the
REVIEW SS MAP menu.
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