INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 231

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 6.XX

e page 229 of 276 ^

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Parameter 31
access: SA1_POCKET source Channel 1 pocket, 0-63
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Parameter 32
access: SA2_POCKET source Channel 2 pocket, 0-63
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Parameter 33
access: SB3_POCKET source Channel 3 pocket, 0-63
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Parameter 34
access: SB4_POCKET source Channel 4 pocket, 0-63
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Parameter 35
access: SC5_POCKET source Channel 5 pocket, 0-63
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Parameter 36
access: SC6_POCKET source Channel 6 pocket, 0-63
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Parameter 37
access: SD7_POCKET source Channel 7 pocket, 0-63
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Parameter 38
access: SD8_POCKET source Channel 8 pocket, 0-63
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Parameter 39
access: AMAPID active map, contains 1..9 indicating current active map.
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Parameter 40
access: IO_SCALAR_ANALOG, numeric value 0..255 which controls a chart recorder analog output value

0..FullScale if chart recorder option set to IOACC control mode.

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Parameter 41
access: LFOVER, xtal life over limit bit map, bits set for xtal channels which are giving valid readings for

which the life value is less than the limit value in the active film program.

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Parameter 42
access: ZPWRS, bit map of which sources are at 0 power or unused, 1 if source has power or is strip-chart

recorder usage.

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Parameter 43
access: XTLAVAIL, bit map in pairs, shows what modules are avail.
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Parameter 44
access: IO1_MODSTS I/O slot 1 module status.
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Parameter 45
access: IO2_MODSTS I/O slot 2 module status.
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Parameter 46
access: IO3_MODSTS I/O slot 3 module status.
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Parameter 47
access: IO4_MODSTS I/O slot 4 module status.
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Parameter 48

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