INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 54)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 52 of 276 ^
If manual mode is entered while in the rise, soak or deposit phases of a deposition, the following arrow key
additions will appear on the 1
st STATUS screen. They can be pressed to change the power% value. The Up
arrow increases power. The Down arrow decreases power. If the pendant is connected, pendant arrow keys
can be used in conjunction with the LCD arrow keys. If an LCD arrow key and a pendant arrow key are
held depressed simultaneously, the last key pressed and held gets the attention.
[Manual mode can be entered by
pressing the fixed front panel MANUAL key while in rise, soak or deposit phases of a deposition.]
The ZERO POWER key is used to zero the power on non-active source outputs only. It has no effect on the
active source output. Pressing the key (box) labeled ZERO POWER brings forth a key to the right of it that
can have 3 possibilities (w/ 1 sensor card): ZERO CH
annel 1, ZERO CH annel 2 and ZERO ALL. After the
3 rd key in the sequence, the area to the right of the zero power key reverts to blank. The ZERO POWER
key is used to select the desired function and the key to the right, which indicates the function, is pressed to
make the selection. If more sensor cards are installed and they are ON (in SYS CONFIG menu), pressing
the key (box) labeled ZERO POWER brings forth the key to the right with up to 9 possibilities (w/ 4 sensor
cards): ZERO CH
annel 1 through ZERO CH annel 8 and ZERO ALL. Again, after the ZERO ALL key in
the sequence, the area to the right of the zero power key reverts to blank.
The ZERO THICK key is used for diagnostics and tooling set up only. It has no effect on the deposition
thickness as seen on the LED display. What is zeroed is the raw value that comes from the sensor card[s].
For either FORCE FAIL or ZERO THICK selector keys, the selections appear to the right in the form of a
key, that when pressed, will effect the named channel[s] with that function. Also, in either case, and
depending upon how many sensor cards are installed and ON (in SYS CONFIG menu), pressing the key
labeled FORCE FAIL or ZERO THICK brings forth the key to the right. The ZERO THICK key yields up
to 9 possibilities (w/ 4 sensor cards): ZERO CH
annel 1 through ZERO CH annel 8 and ZERO ALL and
FAIL CH annel 1 through FAIL CH annel 8, FAIL ALL and RE-VERIFY (for FORCE FAIL key). The
FORCE FAIL key yields up to 10 possibilities (w/ 4 sensor cards): FAIL CH annel 1 through FAIL
CH annel 8, FAIL ALL and RE-VERIFY. The FORCE FAIL function can fail any crystal, including the
active crystal[s]. When a crystal is failed, the system will look for a backup crystal or crystals. To re-