INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 266)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 7.XX e page 264 of 276 ^
Material Reference Table
Common Material
Bulk Density And Z-Factor Values
Material Symbol Bulk Density Z Factor
gm/cc
Aluminum Al
2.73 1.080
Aluminum Oxide Al2O3 3.97 --------
Antimony Sb 6.62 0.768
Arsenic As 5.73 0.966
Barium Ba 3.50 2.100
Beryllium Be 1.85 0.543
Bismuth Bi 9.80 0.790
Bismuth Oxide Bi2O3 8.90 --------
Boron B 2.54 0.389
Cadmium Cd 8.64 0.682
Cadmium Selenide Cdse 5.81 --------
Cadmium Sulfide Cds 4.83 1.020
Cadmium Telluride Cdte 5.85 0.980
Calcium Ca 1.55 2.620
Calcium Fluoride CaF2 3.18 0.775
Carbon (Diamond) C 3.52 0.220
Carbon (Graphite) C 2.25 3.260
Cerium (III) Fluoride CeF3 6.16 --------
Cerium (IV) Oxide CeO2 7.13 --------
Chromium Cr 7.20 0.305
Chromium (III) Oxide Cr2O3 5.21 --------
Cobalt Co 8.71 0.343
Copper Cu 8.93 0.437
Copper (I) Sulfide (A) Cu2S (A) 5.60 0.690
Copper (I) Sulfide (B) Cu2S (B) 5.80 0.670
Copper (III) Sulfide CuS 4.60 0.820
Dysprosium Dy 8.54 0.600
Erbium Er 9.05 0.740
Gadolinium Gd 7.89 0.670
Gallium Ga 5.93 0.593
Gallium Arsenide GaAs 5.31 1.590
Germanium Ge 5.35 0.516
Gold Au 19.3 0.381
Hafnium Hf 13.1 0.360
Hafnium Oxide HfO2 9.63 --------
Holnium Ho 8.80 0.580
Indium In 7.30 1.650
Table 7.1: Material Reference Table. Continued
SECTION 7.2
Aluminum
through Indium