INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual
Page 40
p STC-2002
DEPOSITION CONTROLLER
y
SECTION 2.XX
e page 38 of 276 ^
P
o
w
e
r Soak 1 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 2 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 2 Time
(to pwr level)
0 to 99:59 MM:SS
P
o
w
e
r Soak 2 Time
(@ pwr level)
0 to 99:59 MM:SS
Soak 3 P
o
w
e
r
level
Value
0.0 to 100.0%
P
o
w
e
r Ramp 3 Time
(to pwr level)
0 to 99:59 MM:SS
Control Loop –P
-roportional term
1 to 9999
Control Loop –I
-ntegral term
0.0 to 99.9 sec
Control Loop –D
-erivative term
0.0 to 99.9 sec
Max Power Limit
0.0 to 100.0%
Abort Max P
o
w
e
r SW
OFF/ON
Max Power Dwell
0:01-99:59 MM:SS
C
on
t
ro
l Loop Qual L
imits
0 to 9
Plot Vert Sc
a
l
e
Volts
1, 5, 10, 50, 100
⇐ Graphical display function
Plot Hor
i
z Sc
a
l
e
H
1 to 600 samples
⇐ Graphical display function
Data Plot Type
Rate /Power /Rate Deviation
⇐ Graphical display function
S
ource
S
ensor
Map Select
1 to 9
(Selects the Map that contains Source Sensor analog output parameters)
Etching Mode
Off / On (
Rate Direction can be Positive or Negative)
The Power Related RunTime Screen parameters are:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx
(Manual mode)
(fixed front panel key)
(Manual mode)
(pendant arrow keys [increase / decrease power manually])
(Manual
mode)
(2
nd
STATUS screen arrows:
[increase/decrease power manually])
(Manual
mode)
(1
st
STATUS screen: zero power key [LCD] on non-active channels)
(Manual mode)
(2
nd
STATUS screen: zero thick key [LCD] no effect on material thickness)
(Manual
mode)
(2
nd
STATUS screen: force fail key [LCD] fail/verify crystal channels)
The Power Related System Configuration values are:
Menu path: Main/Executive menu/System Configuration]
Recorder Functions
Rate, Rate Deviation, Power, Thickness, Computer Remote, I/O, Off
Recorder
Analog
Out
put
Ch
a
N
ne
L
1 to 8 Channels (select 1 only)
[note possible conflict w/ Source Analog Output]
Need S
ource
/ S
ensor
Card x
on/off
The Power Related Review S
ource
S
ensor
Map values are:
Menu path: Main/Review SS Map]
Source FS Volt
age Scaling
P
o
W
e
R*
2.5/5/10 Full Scale VOLTS
⇐
see Power Supply input requirement
Source Max P
o
W
e
R
0.0 – 100.0%
Source
Analog
Out
put
CH
a
N
ne
L
1 to 8 Channels (select 1 only)
The Power Related Service Menu values are:
Menu path: Main/Service]
(Memory Contents)
as is (no modification), purged, factory (defaults) [see section x3.21x ]
note
film
parameter
changes
(Reset)
Arm reset, reset armed [Provide a product reset when back panel power
switch is not accessible. Also, use to generate ACCEPT key if not
present (e.g. to end the Test mode when in the Test mode).]
*NOTE: Of primary concern when connecting evaporant power supply to the sensor card.
Dependencies
[Prerequisite states that must be in effect for the following parameters to be fully functional]
The Power Related Film Parameter Dependency List is:
Max Power Dwell
Film Parameter: Abort Max Power SW = ON
These parameters are presented
here for the purpose of name
familiarization and categorization
of power related parameters
across menu and screen
boundaries.