P stc-2002, Deposition controller y – INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 158

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p STC-2002

DEPOSITION CONTROLLER

y

SECTION 5.XX

e page 156 of 276 ^

85

I - M

Istate

Xtal Failed Map- Failed Sensors

86

I - V

Istate

Sample / Hold Status- No cycle Activity, State Not Important [0]

86

I - V

Istate

Sample / Hold Status- Sampling, Xtal is Read for Control [1]

86

I - V

Istate

Sample / Hold Status- Holding, Xtal Covered, estimated Rate [2]

87

I - M

Istate

Crystal Life Over Bounds

88

I - M

Istate

Max. Power Condition- SRC @ Max Power = True, Else False

88

I - M

Istate

Max. Power Condition- No Sources @ Max Power Limit [0]

88

I - M

Istate

Max. Power Condition- Source #1 @ Max Power Limit [1]

88

I - M

Istate

Max. Power Condition- Source #2 @ Max Power Limit [2]

88

I - M

Istate

Max. Power Condition- Source #3 @ Max Power Limit [4]

88

I - M

Istate

Max. Power Condition- Source #4 @ Max Power Limit [8]

88

I - M

Istate

Max. Power Condition- Source #5 @ Max Power Limit [16]

88

I - M

Istate

Max. Power Condition- Source #6 @ Max Power Limit [32]

88

I - M

Istate

Max. Power Condition- Source #7 @ Max Power Limit [64]

88

I - M

Istate

Max. Power Condition- Source #8 @ Max Power Limit [128]

88

I - M

Istate

Max. Power Condition- All Sources @ Max Power Limit [255]

89

I - B

Istate

Increment Key - Hand Controller

90

I - B

Istate

Decrement Key - Hand Controller

91

I - B

Istate

Stop Key – Hand Controller

92

I - V

Istate

Process Verify Phase [0]

(sequencing mode

only)

92

I - V

Istate

Process Stopped, Number Displayed [1]

(sequencing mode

only)

92

I - V

Istate

Process Resting [2]

(sequencing mode

only)

92

I - V

Istate

Process Busy [3]

(sequencing mode

only)

92

I - V

Istate

Process Waiting [4]

(sequencing mode

only)

92

I - V

Istate

Process Error [5]

(sequencing mode

only)

93

I - V

Istate

Process Not Failed [0]

93

I - V

Istate

Bad Recipe [1]

93

I - V

Istate

Process Aborted [2]

94

I - B

Istate

True if front panel is communicating

95

I - B

Istate

true when Sensor card failure occurs

96

I - B

Istate

T=front panel PCB (UIFC) not communicating (w/o STOP key)

97

I - B

Istate

True = Crystal Test / Simulate Mode Activated

98

I - M

Istate

Rotator Sync Map- Synchronization needed, 1 per each Source

99

I - V

Istate

Active Source Being Controlled [1 To 8]

100

I - B

Istate

True = Non-Sequencing Mode Active

101

I - V

Istate

Active Map of Source Sensor usage

102

I - M

Istate

Available Modules (in bit map pairs)

103

I - V

Istate

Source 1: Pocket Code [0-63] (in Film Program)

104

I - V

Istate

Source 2: Pocket Code [0-63] (in Film Program)

105

I - V

Istate

Source 3: Pocket Code [0-63] (in Film Program)

106

I - V

Istate

Source 4: Pocket Code [0-63] (in Film Program)

107

I - V

Istate

Source 5: Pocket Code [0-63] (in Film Program)

108

I - V

Istate

Source 6: Pocket Code [0-63] (in Film Program)

109

I - V

Istate

Source 7: Pocket Code [0-63] (in Film Program)

110

I - V

Istate

Source 8: Pocket Code [0-63] (in Film Program)

111

I - V

Istate

I/O Slot 1: PCB Status: Not Established Yet [0]

111

I - V

Istate

I/O Slot 1: PCB Status: Not Detected, Config = Empty [1]

111

I - V

Istate

I/O Slot 1: PCB Status: Disabled Input Card in Slot [2]

111

I - V

Istate

I/O Slot 1: PCB Status: Disabled Output Card in Slot [3]

111

I - V

Istate

I/O Slot 1: PCB Status: Input Card Detected in Slot [4]

111

I - V

Istate

I/O Slot 1: PCB Status: Output Card Detected in Slot [5]

111

I - V

Istate

I/O Slot 1: PCB Status: MIA, Config'd Input on Empty Slot [6]1

111

I - V

Istate

I/O Slot 1: PCB Status: Conflict, have output, need input card [7]

111

I - V

Istate

I/O Slot 1: PCB Status: MIA, Config'd Output on Empty Slot [8]

111

I - V

Istate

I/O Slot 1: PCB Status: Conflict, have input, need output card [9]

112

I - V

Istate

I/O Slot 2: PCB Status (see Slot 1 breakout)

113

I - V

Istate

I/O Slot 3: PCB Status (see Slot 1 breakout)

114

I - V

Istate

I/O Slot 4: PCB Status (see Slot 1 breakout)

115

I - V

Istate

Sensor Slot A Status: Unknown (until PCB is polled) [0]

115

I - V

Istate

Sensor Slot A Status: PCB Located by Communication [1]

115

I - V

Istate

Sensor Slot A Status: PCB Not Located by Communication [2]

115

I - V

Istate

Sensor Slot A Status: PCB exists but incorrect Configuration [3]

115

I - V

Istate

Sensor Slot A Status: No PCB but correct Configuration [4]

115

I - V

Istate

Sensor Slot A Status: PCB has Incompatible Software Rev [5]

ID n

u

mber

|

Valid

Func

tions – Type |

C

lass |

Descrip

tion

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