INFICON STC-2002 Thin Film Deposition Controller Operating Manual User Manual

Page 262

Advertising
background image

p STC-2002

DEPOSITION CONTROLLER

y

SECTION 6.XX

e page 260 of 276 ^

between 0..88888888 can be conceptually entered,

but data entry process will compress the information

into minimum form by removing redundant
(subsequent) numbers. Example, the value 1242134,
although less than 8 digits, can be minimally expressed
as 1243.


4 STOOL Sensor Tooling factor 10.0 to 400.0 percent.

5 SWGHT Sensor averaging weighting factor. 10.0 to 400.0.

______________________________________________________________________

Returns: Error codes typical to format or range failure if format is incorrect. Returns [RZCD_AOK]
followed by parameter's value as stored in system ( enumerations start w/0 values, numbers having numeric
meanings stored naturally except floating point values are stored as integer values with implied decimal
points of fixed precision ). For example, m2,7,4 will query SS Map # 2, Crystal/Sensor channel 7, tooling
value from 10.0 to 400.0 percent for internal storage value of 100 to 4000 .

______________________________________________________________________

Command: n
Mnemonic: EXCT_SSMAP_UPD
Parameters: either

<SSMAP#>,<SPARM#9..N>=<QQ> or

<SSMAP#>,<CHNL#1..8>,<CPARM#1..N>=<QQ>

Description:

Command to set/program the multichannel Source/Sensor map parameters used to

configure the measurement process applied to a film. SSMAP# is an integer, 1..9, identifying which map is
being programmed. The second parameter, when in the range of 1..8, indicates a sensor channel (crystal
head) configuration is targeted, with the third parameter CPARM# ranging from 1..N (see table of
SnsChnlAtrb_class SCA_xxx_G values in 'm' command above). The second parameter, when in the range
of 9..N, will associate with the sensor map SPID_OUTFS (FIRST_GENERIC_SENSOR_MAP_P) thru
LAST_GENERIC_SENSOR_MAP_P (SPID_SFAILM) value per the SPARM# table above ( see 'm'
command above).
Returns:

[RZCD_AOK] (A or B) if correctly processed.

[RZCD_ILDV] if improper value for parameter argument.

[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if chosen parameter can not be programmed at this time. This currently does not
apply to any sensor map parameters, but could change in future, as needed.


______________________________________________________________________

Command: ]
Mnemonic: EXCT_echochek
Parameters:

Any and all

Description:

Special test code to implement test software, will echo back complete string content

identical to what was sent in. That is, sending ]HELLO returns the result of [RZCD_AOK]]HELLO where
[RZCD_AOK] is either an A or B.
Returns:

[RZCD_AOK]]xxxxx where xxxx is whatever was sent in to the parser following the ] character.


Advertising