INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 57)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 55 of 276 ^
Flow chart depicting the steps of a START process.
First press of START key + RESET/START PROC key: to REST location.
Second press of START key + RESET/START PROC key: to STOP location.
Third press of START key + RESET/START PROC key: to VERIFY CRYSTAL location.
This sequence was presented to help provide an understanding of a start. Other sequences are possible.
VERIFY
XTAL
WAIT
CHECK
BUSY
Proc
ERROR
REST
STOP
1 st RESET/START PROC
2 nd RESET/START PROC
3 rd RESET/START PROC
LAYER = #