INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 277)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 11.XX e page 275 of 276 ^
date___-___-___ [copy this page to record map parameters]
Source Sensor Map Parameters for Map #________ in Film #_______ in Process #________:
Source Sensor Full Power Volts 2.5, 5, 10 full scale volts
Source Sensor Max P o w e r Value 0.0% - 100.0%
Source Sensor Analog Out put Chnl 1 – 8 Channel Selection
Master Tooling Value 10.0% - 400.0%
Minimum Start Xtal Channels 1 – 8 minimum channels
Minimum Backup Xtal Channels 0 – 7 minimum channels
Minumum Active Xtal Channels 1 – 8 minimum channels
Xtal Channel Drop Filter NONE, BALANCE
Indexer Synchronization Mode NONE, DELAY, FEEDB AC K
Indexer Synchronization Time 2 – 999 sec ond s
Channel 1 Start Mode OFF, ACT IVE , STANDBY
Channel 1 Fail Action Mode NONE, ABORT FILM
Channel 1 Backup List X – XXXXXXXX
Channel 1 Tooling Value 10.0% - 400.0%
Channel 1 Weight 10.0% - 400.0%
Channel 2 Start Mode OFF, ACT IVE , STANDBY
Channel 2 Fail Action Mode NONE, ABORT FILM
Channel 2 Backup List X – XXXXXXXX
Channel 2 Tooling Value 10.0% - 400.0%
Channel 2 Weight 10.0% - 400.0%
Channel 3 Start Mode OFF, ACTIVE, STANDBY
Channel 3 Fail Action Mode NONE, ABORT FILM
Channel 3 Backup List X – XXXXXXXX
Channel 3 Tooling Value 10.0% - 400.0%
Channel 3 Weight 10.0% - 400.0%
Channel 4 Start Mode OFF, ACTIVE, STANDBY
Channel 4 Fail Action Mode NONE, ABORT FILM
Channel 4 Backup List X – XXXXXXXX
Channel 4 Tooling Value 10.0% - 400.0%
Channel 4 Weight 10.0% - 400.0%
Channel 5 Start Mode OFF, ACTIVE, STANDBY
Channel 5 Fail Action Mode NONE, ABORT FILM
Channel 5 Backup List X – XXXXXXXX
Channel 5 Tooling Value 10.0% - 400.0%
Channel 5 Weight 10.0% - 400.0%
Channel 6 Start Mode OFF, ACTIVE, STANDBY
Channel 6 Fail Action Mode NONE, ABORT FILM
Channel 6 Backup List X – XXXXXXXX
Channel 6 Tooling Value 10.0% - 400.0%
Channel 6 Weight 10.0% - 400.0%
Channel 7 Start Mode OFF, ACTIVE, STANDBY
Channel 7 Fail Action Mode NONE, ABORT FILM
Channel 7 Backup List X – XXXXXXXX
Channel 7 Tooling Value 10.0% - 400.0%
Channel 7 Weight 10.0% - 400.0%
Channel 8 Start Mode OFF, ACTIVE, STANDBY
Channel 8 Fail Action Mode NONE, ABORT FILM
Channel 8 Backup List X – XXXXXXXX
Channel 8 Tooling Value 10.0% - 400.0%
Channel 8 Weight 10.0% - 400.0%