INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 101)

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IQS-233 Operating Manual
2.3.8 Process Readouts
Figure 2-63 IQS-233 Codeposition window
Process . . . . . . . . . . . . . . . . The name of the current Process.
Layer . . . . . . . . . . . . . . . . . . The current Layer of the Process.
Time/Run . . . . . . . . . . . . . . . Time displays the elapsed time from the start of the
current Layer until the Layer is completed or
stopped. Run displays the number of times the
current Process has been started.
Time (Process) . . . . . . . . . . The elapsed time from the start of the current
Process until the Process is completed or stopped.
Phase. . . . . . . . . . . . . . . . . . The current phase of the Process.
 Preconditioning (Indexing, Ramp 1, 2..., Soak 1,
2..., Shutter Delay)
 Deposit
 Feed
 Idle
 Stopped