INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 110)

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IQS-233 Operating Manual
3 Click File and select Process to display a list of saved Process configurations
(refer
Figure 2-9 on page 2-10 ). The Process list displays a check next to the
current Process name indicating that the Process configuration has been
loaded for the Process name.
4 Select Auto source control (using a PID control loop) or Manual source control
using the command buttons on the IQS-233 Codeposition window (refer to
Figure 2-56 on page 2-74 ).
NOTE: When Auto  Man is displayed, PID control loop is activated and
parameters used for automatic control are displayed.
5 Click Auto  Man , which changes to Man  Auto , to activate Manual mode and
display parameters used for manually controlling a deposition without PID loop
control.
6 If the process requires data logging:
6a Click Logging Off, which changes to Logging On, to activate data
logging. (Click Logging On, which changes to Logging Off, to make data
logging unavailable.)
6b Click File >> Log Data to select the parameters to be logged (refer to
section 2.3.3.1.5 on page 2-14 ).
7 Click Edit >> System and select Card tab (refer to Figure 2-41 on page 2-56 ).
8 Deselect Enabled in the Simulate pane.
9 Click OK to save changes.
10 Click View and click the graph to be displayed on the graph pane of the
IQS-233 Codeposition Software window (refer to
Figure 2-50 on page 2-66 ).
Also, click Film Settings, Sensor Readings, and/or High Resolution to
customize the display of the IQS-233 Codeposition Software window. Refer to
section 2.3.4 on page 2-66 , for a detailed listing and explanation of each item.
11 Click Start Process, which changes to Abort Process, to start the Process.
12 Click Start Layer, which changes to Stop Layer, to start the Layer.
13 Click Stop Layer, which changes to Start Layer, to stop the Layer.
14 Click Next Layer to increment the Layer number to the next Layer of the
Process.
15 Click Abort Process, which changes to Start Process, to stop the Process.
16 Click File >> Exit to exit IQS-233 Codeposition software (refer to
section 2.3.3.4 on page 2-17 ).