3 sensor graph – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

2.3.7.3 Sensor Graph

Click Sensor Graph to display the Sensor Graph window. See

Figure 2-61

. The

Sensor Graph displays the deposition rate of individual sensors mapped to the
Output used for the current Layer versus time.

NOTE: For a Codeposition Layer, the individual sensor rates of each assigned

sensor will be displayed on the graph.

Figure 2-61 Sensor Graph window

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