3 sensor graph – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
Page 99
Advertising
2 - 79
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
2.3.7.3 Sensor Graph
Click Sensor Graph to display the Sensor Graph window. See
Sensor Graph displays the deposition rate of individual sensors mapped to the
Output used for the current Layer versus time.
NOTE: For a Codeposition Layer, the individual sensor rates of each assigned
sensor will be displayed on the graph.
Figure 2-61 Sensor Graph window
Advertising