INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Sensor Shutter (1 to 8) . . . This relay controls the sensor shutter. The relay
command depends on whether the sensor is single
or dual:
for a single sensor configuration, the relay will
activate at the start of Shutter Delay (if selected)
or the start of the deposition phase and
deactivate at the start of the postconditioning
phase.
for a dual sensor configuration, the relay is
activated when a Crystal Fail condition occurs.
NOTE: Crystal Fail must be selected (refer to
section 2.3.3.5.11 on page 2-37
relay to command the Dual sensor
configuration (refer to
Process Stopped . . . . . . . . The relay will activate when Abort Process is
selected and deactivate when Start Process is
selected.
Process Running . . . . . . . . The relay will activate when Start Process is selected
and deactivate when Abort Process is selected.
Layer Stopped . . . . . . . . . . The relay will activate when Stop Layer is selected
and deactivate when Start Layer is selected.
Layer Running . . . . . . . . . . The relay will activate when Start Layer is selected
and deactivate when Stop Layer is selected.
Deposit Phase . . . . . . . . . . The relay will activate at the start of the deposition
phase and deactivate at the start of the
postconditioning phase.
Pre-Cond Phase . . . . . . . . . The relay will activate at the start of the
preconditioning phase and deactivate at the start of
deposition phase.
Soak Hold Phase . . . . . . . . The relay will activate at the start of the Auto Soak 2
(if selected) phase and deactivate at the start of the
Shutter Delay (if selected) or deposition phase.
Process Active . . . . . . . . . . The relay will activate if a Process is temporarily
halted for any reason (for example, if a Layer is
waiting for a Manual Start) and deactivate when the
Process is active again.
Manual Mode . . . . . . . . . . . The relay will activate when Manual mode is active
and deactivate when Auto mode is active.