INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 97)

2 - 77
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
2.3.7.1 Deviation Graph
Click Deviation Graph to display the Deviation Graph window. See Figure 2-59 .
The Deviation Graph displays the percent deviation from the desired rate versus
time.
NOTE: For a Codeposition Layer, the Rate Deviation of each Film will be displayed
on the graph.
Figure 2-59 Deviation Graph window