INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 60)

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IQS-233 Operating Manual
Crystal Quality pane
A Crystal Quality error occurs if the deposition rate exceeds a percentage of the
desired rate for a specified number of measurements.
Enabled . . . . . . . . . . . . . . . Select the check box to activate the Crystal Quality
command.
(%) . . . . . . . . . . . . . . . . . . . . 0 to 50%
The ± percentage (sign is not entered before the
value) of deviation from the desired rate that when
exceeded increments a counter or when not
exceeded decrements the counter. The % parameter
is used in conjunction with the (counts) parameter.
(counts) . . . . . . . . . . . . . . . . 0 to 99
During the deposition phase, each rate
measurement exceeding the (%) value increments a
counter. Each rate measurement not exceeding the
(%) value decrements the counter to a minimum
count of 0. If the quantity of measurement counts
exceeds the (counts) value, the On Error action is
initiated and the message Xtal Fail: Sensor x Qual is
displayed.