INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 125)

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IQS-233 Operating Manual
Figure 4-3 Examples of Control Loop Damping
Figure 4-4 Examples of Dead Time Settings
POSITIVE STEP
TIME
----------- over damped
----------- critically damped
----------- under damped
NEGATIVE STEP +40
-40
0
SETPOINT
TIME
RA
TE
DELA
Y TIME
INCREASING
O – under damped
A – critically damped
B – over damped
O
A
B