INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Sensor(s):

Setpoint Å/s . . . . . . . . . . . . -999.90 to 999.90 Å/s

When Sensor(s) is selected, the Setpoint (Å/s) box is
displayed where a value for the deposition rate (or
the initial deposition rate if rate ramps are used) is
selected.

Timed Power:

Setpoint % Pwr . . . . . . . . . . 0.00 to 100.00%

When Timed Power is selected, the Setpoint % Pwr
box is displayed where a value equal to a percentage
of the full scale source Output voltage is selected.
The source Output Power will remain at this constant
level during the deposition phase. The deposition
phase ends when the Final Thickness value is
reached, or the Time Endpoint value is reached,
whichever occurs first.

Final Thickness (kÅ) . . . . . 0.000 to 999.900 kÅ

When this value is reached, deposition ends and the
postcondition phases start. The postcondition
phases are configured in the Condition tab of the
Film Edit window (see

Figure 2-30 on page 2-34

Thickness Endpoint (kÅ) . . 0.000 to 999.900 kÅ

When this value is reached, the Thickness Setpoint
relay will be activated if selected in the I/O tab of the
System Setup window. See

Figure 2-40 on page

2-52

NOTE: The IQM-232 and SQM-242 cards do not

contain relays. A PLC is required to provide
the relays. See

Chapter 3, Digital I/O

Time Endpoint (s) . . . . . . . . 0.00 to 30000.00 s

When this value is reached, the Time Setpoint relay
will be activated if selected in the I/O tab of the
System Setup window.

NOTE: IQM-232 and SQM-242 cards do not contain

relays. A PLC is required to provide the
relays. See