3 indexers tab, Ab, see – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
2.3.3.6.3 Indexers Tab
Source Indexers, a Substrate Indexer, and User Indexers are configured in the
Indexers tab. See
NOTE: A Programmable Logic Controller (PLC) is required to provide the I/O
required to control indexers.
A unique Source Indexer is available for each source Output. The Source Indexer
will move to the Index number it is assigned to at the start of each Layer.
The Substrate Indexer and User Indexers will move to the Index number they are
assigned to at the start of each Layer.
User Indexers are useful for controlling external equipment.
Any of the indexers can be tested from within the Indexer tab without having to start
a Process.
Figure 2-39 System Setup window - Indexers tab
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